Title :
The world of micro-optics
Author :
Herzig, Hans-Peter
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
Micro-optical elements are optical components with structures in the sub-mm and sub-μm range, which are fabricated by a variety of high-resolution lithographic and optical processes. Micro-optics includes free-space optics, integrated optics, semiconductor light sources and detectors. This overview concentrates on free-space micro-optics where the light propagates in 3D. Data for arbitrary phase profiles can be transformed into efficient optical elements. These elements are made of rigid materials, such as glass and fused silica, or they are replicated at low cost into plastic and epoxy materials. Micro-optical elements are used in various applications, ranging from illumination to medicine. Some examples are presented
Keywords :
Fourier transform spectrometers; integrated optics; light sources; micro-optics; microlenses; optical communication equipment; optical fabrication; optical sensors; replica techniques; 3D light propagation; arbitrary phase profiles; beam shaping; chemical microchips; epoxy materials; free-space optics; fused silica; glass; high-resolution lithography; illumination light pipes; integrated optics; micro-optics; microlenses; miniaturised spectrometers; optical MEMS; optical components; plastic materials; replication; semiconductor light sources; Biomedical optical imaging; Costs; Glass; Integrated optics; Light sources; Optical devices; Optical materials; Optical propagation; Semiconductor materials; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
Conference_Location :
Rio Grande
Print_ISBN :
0-7803-5947-X
DOI :
10.1109/LEOS.2000.894004
