Title :
Micromachined inset-fed patch antenna at Ka-band
Author :
Sharma, Preeti ; Koul, Shiban K. ; Chandra, Sudhir
Author_Institution :
Indian Inst. of Technol. Delhi, New Delhi
Abstract :
In this paper, we report the design and fabrication of high performance Ka-band inset- fed micromachined patch antenna using post- CMOS compatible process technology. The main emphasis of this paper is to demonstrate use of RF sputtering as potential metal-dielectric films deposition-process for rapid prototyping of many antenna structures in the absence of access to a well- established MEMS foundry. The fabricated antenna resonated at 35 GHz with 3.14% impedance bandwidth.
Keywords :
CMOS integrated circuits; antenna feeds; micromechanical devices; microstrip antennas; millimetre wave antennas; sputtering; MEMS; RF sputtering; frequency 35 MHz; impedance bandwidth; metal-dielectric films deposition-process; micromachined inset-fed patch antenna; post-CMOS compatible process technology; rapid prototyping; CMOS process; CMOS technology; Fabrication; Foundries; Impedance; Micromechanical devices; Patch antennas; Prototypes; Radio frequency; Sputtering; Bulk-Micromachining; Micromachined patch antenna; RF sputtering; dielectric membrane; inset feed;
Conference_Titel :
Microwave Conference, 2006. APMC 2006. Asia-Pacific
Conference_Location :
Yokohama
Print_ISBN :
978-4-902339-08-6
Electronic_ISBN :
978-4-902339-11-6
DOI :
10.1109/APMC.2006.4429514
