Title :
Compact, high-displacement piezoelectric actuator with potential micromechanical applications
Author :
Robbins, William P. ; Polla, Dennis L. ; Glumac, Daniel E.
Author_Institution :
Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA
Abstract :
An actuator was developed that, in a macroscale version, is composed of a number of parallel bars of lead zirconate titanate (PZT) connected together in a meander line configuration so that they are mechanically in series and electrically in parallel. The polarity of the adjacent bars is arranged so that if a given bar expands under the applied voltage, the adjacent bars contract. Experimental measurements are in agreement with the predictions of an electromechanical model of the actuator. The design and fabrication of a micromechanical version of the actuator is also described
Keywords :
electric actuators; micromechanical devices; piezoelectric devices; PZT bars; PbZrO3TiO3; compact actuator; electromechanical model; high-displacement piezoelectric actuator; macroscale version; meander line configuration; micromechanical applications; parallel bars; polarity; Bars; Capacitive sensors; Geometry; Micromechanical devices; Piezoelectric actuators; Piezoelectric devices; Robust stability; Scanning electron microscopy; Titanium compounds; Voltage;
Conference_Titel :
Ultrasonics Symposium, 1990. Proceedings., IEEE 1990
Conference_Location :
Honolulu, HI
DOI :
10.1109/ULTSYM.1990.171550
