Title :
A shielded cantilever-tip microwave probe for micro/nano surface imaging of conductive properties
Author :
Yang, Y.L. ; Lai, K.J. ; Tang, Q.C. ; Kundhikanjana, W. ; Kelly, M. ; Shen, Z.X. ; Li, Xinxin
Author_Institution :
Shanghai Inst. of Microsyst. & Inf. Technol., Chinese Acad. of Sci., Shanghai, China
Abstract :
This paper reports an electromagnetic shielded cantilever-tip microwave-probe for conductive-property imaging at micro/nano surface-area. Equipped with an ultra-sharp tip apex (<;50 nm), the probe features small conducting path resistance of Rs<;5Ω and conducting path-to ground capacitance of Ctip≈1pF. These optimal-designed parameters facilitate satisfactory spatial resolution and microwave-signal intensity during probing test. The fabrication method is low-cost and suitable for batch-fabrication.
Keywords :
cantilevers; electrical conductivity measurement; electromagnetic shielding; elemental semiconductors; micromechanical devices; microwave measurement; nanostructured materials; probes; silicon; silicon compounds; surface structure; Si; SiN; batch-fabrication; conducting path resistance; conductive property imaging; electromagnetic shielded cantilever-tip microwave-probe; microsurface imaging; microwave-signal intensity; nanosurface imaging; path-to-ground capacitance; probing test; shielded cantilever-tip microwave probe; ultra-sharp tip apex; Capacitance; Metals; Microwave imaging; Microwave theory and techniques; Probes; Silicon; Surface topography;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734366
