MPCVD Processing of Titanium-diffused LiNbO3 Waveguides: Optical Characterisation and Waveguide Restoration

Author

Trpkovski, S. ; Bui, Lam A. ; Gibson, B.C. ; Huntington, S.T. ; Simpson, D. ; Ampem-Lassen, E. ; Rabeau, J.R. ; Mitchell, A.

Author_Institution

Univ. of Melbourne, Melbourne

fYear

2006

fDate

6-8 Dec. 2006

Firstpage

253

Lastpage

255

Abstract

This paper presents some initial findings that explore the material properties of LiNbO₃ which has been exposed to a microwave plasma-enhanced chemical vapor deposition (MPCVD) environment. The LiNbO₃ was found to undergo a process known as ´reduction´ when exposed to this environment. A technique was developed to reverse this process and recover the LiNbO₃, which is a crucial first step towards the integration of diamond-based single photon sources with LiNbO₃ waveguide technologies.

Keywords

diamond; lithium compounds; optical fabrication; optical waveguides; plasma CVD; titanium; LiNbO₃; MPCVD processing; diamond-based single photon sources; microwave plasma-enhanced chemical vapor deposition; optical characterisation; titanium-diffused waveguides; waveguide restoration; waveguide technologies; High speed optical techniques; Integrated optics; Optical attenuators; Optical losses; Optical polarization; Optical refraction; Optical variables control; Optical waveguides; Physics; Quantum computing; LiNbO3; MPCVD; diamond; optical; waveguide;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronic and Microelectronic Materials and Devices, 2006 Conference on

Conference_Location

Perth, WA

Print_ISBN

978-1-4244-0578-7

Electronic_ISBN

978-1-4244-0578-7

Type

conf

DOI

10.1109/COMMAD.2006.4429929

Filename

4429929