DocumentCode
2767243
Title
Friction, adhesion, and wear properties of PDMS coatings in MEMS devices
Author
Penskiy, Ivan ; Gerratt, Aaron P. ; Bergbreiter, Sarah
Author_Institution
Mech. Eng., Univ. of Maryland, College Park, MD, USA
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
440
Lastpage
444
Abstract
This paper demonstrates the first tests of friction, adhesion, and wear properties of thin poly(dimethylsiloxane) (PDMS) films deposited on the sidewalls of silicon-on-insulator structures. The curves of coefficient of friction versus normal pressure were obtained for PDMS-on-PDMS, PDMS-on-silicon, and silicon-on-silicon sidewall interfaces. Tests were also completed to evaluate the effects of aging and wear on the properties of PDMS. The results of friction tests showed that the coefficient of friction follows the Hertz contact model, and in the wear tests PDMS showed high resistance to abrasion.
Keywords
adhesion; friction; materials testing; micromechanical devices; silicon-on-insulator; wear; Hertz contact model; MEMS devices; PDMS coatings; adhesion; coefficient of friction; silicon-on-insulator structures; wear properties; Actuators; Adhesives; Force; Friction; Micromechanical devices; Resonant frequency; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734456
Filename
5734456
Link To Document