An ultra-high sensitivity, capacitive pressure sensor using ionic liquid

We introduce a novel, microfluidic capacitive pressure sensor which uses a high capacitance per unit area at the interface between the metal and ionic liquid. Unlike traditional pressure sensors, which use rigid material constructs, we employ conductive liquid and elastomeric constructs as the sensing medium-a design which is very responsive to applied pressure. A prototyped sensor achieves a sensitivity of 522.5 pF/mmHg.