DocumentCode :
2768027
Title :
2003 IEEE International Integrated Reliability Workshop Final Report (IEEE Cat. No.03TH8715)
fYear :
2003
fDate :
23-23 Oct. 2003
Abstract :
The following topics are dealt with: interface traps, oxide traps, NBTI, PBTI, advanced CMOS, corona charging, thermal structures, gate oxide, reliability parameters, stress testing, dielectric thin films, charge trapping, MOCVD, stack structures, NPN, transistors, DC device, current mirror method, thermal instability, SOI, BJT, hot carrier, MOSFET, DPN, gate dielectrics, BiCMOS, PMOS, failure mode, SRAM, leakage current, circuit-level stress, inverter, copper dual-damascene interconnect, metal insulator metal capacitors, MIMCAP, memory chips, space applications, tunnel dielectric, ramped current, voltage, DRAM technology, GOI test, plasma charging, power pins, product screening stress, TDDB, HC measurements, PLDD, implant energy optimization, negative bias temperature instability, junction temperature, microelectronic device, dielectric barriers, joule heating, electromigration parameters, aluminium backend, oxide breakdown, magnetoresistive random access memory, MRAM, and product wafers.
Keywords :
BiCMOS integrated circuits; CMOS integrated circuits; chemical vapour deposition; electromigration; integrated circuit reliability; interface states; semiconductor device reliability; BJT; BiCMOS; DC device; DPN; DRAM technology; GOI test; HC measurements; MIMCAP; MOCVD; MOSFET; MRAM; NBTI; NPN transistors; PBTI; PLDD; PMOS; SOI; SRAM; TDDB; aluminium backend; charge trapping; circuit-level stress; copper dual-damascene interconnect; corona charging; current mirror method; dielectric barriers; dielectric thin films; electromigration parameters; failure mode; gate dielectrics; gate oxide; hot carrier; implant energy optimization; interface traps; inverter; joule heating; junction temperature; leakage current; magnetoresistive random access memory; memory chips; metal insulator metal capacitors; microelectronic device; negative bias temperature instability; oxide breakdown; oxide traps; plasma charging; power pins; product screening stress; product wafers; ramped current; reliability parameters; space applications; stack structures; stress testing; thermal instability; thermal structures; tunnel dielectric; voltage; BiCMOS integrated circuits; CMOS integrated circuits; CVD; Electromigration; Integrated circuit reliability; Interface phenomena; Semiconductor device reliability;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Integrated Reliability Workshop Final Report, 2003 IEEE International
Conference_Location :
Lake Tahoe, CA, USA
Print_ISBN :
0-7803-8157-2
Type :
conf
DOI :
10.1109/IRWS.2003.1283288
Filename :
1283288
Link To Document :
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