Title :
Piezoactuators for motion control from centimeter to nanometer
Author :
Breguet, J.-M. ; Perez, R. ; Bergander, A. ; Schmitt, C. ; Clavel, R. ; Bleuler, H.
Author_Institution :
EPFL, Swiss Federal Inst. of Technol., Lausanne, Switzerland
Abstract :
This paper presents several approaches for piezoactuators in motion control over a large dynamic range (cm to nm). The devices include monolithic two-degree-of-freedom actuators with mechanical amplification, stick-slip actuators and 6-DOF designs of micro-positioners. Closed loop feedback is of course necessary for good performance. All the proposed solutions have been realized and experimental results are discussed, application examples in scanning probe microscopy and biology are shortly presented
Keywords :
closed loop systems; feedback; motion control; piezoelectric actuators; 6-DOF designs; closed loop feedback; mechanical amplification; micro-positioners; monolithic 2-DOF actuators; motion control; piezoactuators; stick-slip actuators; Actuators; Arm; Costs; Dynamic range; Flexible structures; Motion control; Nanobioscience; Piezoelectric materials; Scanning probe microscopy; Voltage;
Conference_Titel :
Intelligent Robots and Systems, 2000. (IROS 2000). Proceedings. 2000 IEEE/RSJ International Conference on
Conference_Location :
Takamatsu
Print_ISBN :
0-7803-6348-5
DOI :
10.1109/IROS.2000.894652
