Title :
Micro bead type temperature sensor with ratiometric fluorescence dyes encapsulated by Parylene
Author :
Aoki, H. ; Kan, T. ; Binh-Khiem, N. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
Abstract :
We propose a sensor for measuring temperature of micro regions with ratiometric fluorescence dye beads encapsulated by Parylene. With the proposed method, we can fabricate encapsulated micro beads with constant size and dye concentration, which is suitable and preferred for precise sensing using fluorescence intensity measurement. This micro bead type sensor can be used for micro regions, which are difficult to apply conventional methods. This type of sensor is also easy to use to measure the temperature of not only positions located on the surface of the target object but also those located deep inside its volume. We demonstrated that this sensor could measure the temperature of micro regions with the accuracy ranging from ± 0.8°C to ± 3.7°C.
Keywords :
intensity measurement; temperature measurement; temperature sensors; Parylene; constant size; dye concentration; encapsulated microbeads; fluorescence intensity measurement; microbead type temperature sensor; ratiometric fluorescence dyes; temperature measurement; Arrays; Band pass filters; Fluorescence; Temperature dependence; Temperature measurement; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734578