DocumentCode :
2771062
Title :
A novel DFM cantilever with tuning function of resonant frequency for biomaterial imaging
Author :
Hashimoto, Yoshihiko ; Hanasaki, Itsuo ; Isono, Yoshitada
Author_Institution :
Grad. Sch. of Eng., Kobe Univ., Kobe, Japan
fYear :
2011
fDate :
23-27 Jan. 2011
Firstpage :
1217
Lastpage :
1220
Abstract :
We have developed a novel dynamic force microscope (DFM) cantilever with a function of tuning resonant frequency for measuring the topography of biomaterials with a single cantilever. We have integrated the electrostatic driving, clamping, and the lever motion amplification systems into the cantilever to change the cantilever length for varying the spring constant and resonant frequency. The resonant frequency is tunable in the range from 12 to 998 kHz, corresponding to the spring constant of 0.6 to 458 N/m. The system enables the imaging of biomolecule under a suitable condition by tuning the resonant frequency.
Keywords :
atomic force microscopy; bioMEMS; biological techniques; cantilevers; electrostatic devices; microactuators; microfabrication; molecular biophysics; springs (mechanical); surface topography measurement; DFM cantilever; biomaterial imaging; biomaterial topography; biomolecule imaging; clamping; dynamic force microscope; electrostatic driving; frequency 12 kHz to 998 kHz; lever motion amplification systems; resonant frequency; spring constant; tuning function; Actuators; Electrostatics; Force; Resonant frequency; Springs; Surface topography; Tuning;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
ISSN :
1084-6999
Print_ISBN :
978-1-4244-9632-7
Type :
conf
DOI :
10.1109/MEMSYS.2011.5734651
Filename :
5734651
Link To Document :
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