A 3D stick-slip nanopositioner for nanomanipulation

A compact nanopositioner which consists of three stick-slip inertial stages was designed and built particularly for nanomanipulation inside a scanning electron microscope (SEM). Considering linear dynamics of PZT and nonlinear friction between slider and rod, a comprehensive model representation of the stick-slip stage was presented and verified by being compared with experimental results. Resolution to 10nm has been achieved and the ability to lift up to 70g has been demonstrated. Some manipulations of nanowires were performed in assistant of the nanopositioner we developed, including picking up and bending single ones. Both results of experiments and manipulations demonstrated the excellent performance of the nanopositioner.