A micromachined silicon accelerometer with fibre optic interrogation

The authors report some initial experimental results on the performance of a miniature accelerometer fabricated using silicon micromechanics, but employing electrically passive techniques to detect the deflection of the inertial mass. Specifically, they have used guided wave optical techniques, involving optical fibres, to detect the motion of the inertial mass. By this means of interrogation it is possible to realise a remotely located, electrically passive and e.m.i. immune sensor-features of advantage in certain applications such as avionics, process control and medical measurements