DocumentCode
2777974
Title
Automated Preventive Maintenance Of Plasma Etch Systems With The Secs Protocol
Author
Byrne, P.P. ; Youlton, D.S. ; Heiman, K.R. ; Miller, A.
Author_Institution
Brookside Software
fYear
1992
fDate
28-30 Sep 1992
Firstpage
135
Lastpage
137
Keywords
Etching; Fabrication; Job shop scheduling; Plasma applications; Preventive maintenance; Production; Protocols; Semiconductor device manufacture; Software performance; System performance;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International
Print_ISBN
0-7803-0755-0
Type
conf
DOI
10.1109/IEMT.1992.639877
Filename
639877
Link To Document