Title :
Fabrication of micro-channels and waveguides by fs-laser direct writing in glasses
Author :
Gottmann, Jens ; Esser, Dagmar ; Hörstmann-Jungemann, Maren
Author_Institution :
Lehrstuhl fur Lasertech. (LLT), RWTH Aachen Univ., Aachen, Germany
Abstract :
Micro-channels in fused silica and waveguides in laser active glass materials are fabricated with fs-laser pulses. The use of a high repetition rate laser and a fast scanning system potentially allow the fabrication of laser sources and micro-mechanical components with high speed.
Keywords :
high-speed optical techniques; laser materials processing; micro-optomechanical devices; microfabrication; optical glass; optical waveguides; silicon compounds; fast scanning system; high-speed optical technique; laser direct writing; microchannel fabrication; micromechanical components; optical glasses; optical waveguides; Etching; Glass; Optical device fabrication; Optical materials; Optical pulses; Optical waveguides; Refractive index; Silicon compounds; Waveguide lasers; Writing;
Conference_Titel :
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-4079-5
Electronic_ISBN :
978-1-4244-4080-1
DOI :
10.1109/CLEOE-EQEC.2009.5191724
