Title :
Effects of shear strain on the conduction band in silicon: An efficient two-band k·p theory
Author :
Sverdlov, Viktor ; Ungersboeck, Enzo ; Kosina, Hans ; Selberherr, Siegfried
Author_Institution :
Tech. Univ. Wien, Vienna
Abstract :
We present an efficient two-band kldrp theory which accurately describes the six lowest conduction band valleys in silicon. By comparing the model with full band pseudo-potential calculations we demonstrate that the model captures both the nonparabolicity effects and the stress-induced band structure modification for general stress conditions. It reproduces the stress dependence of the effective masses and the nonparabolicity parameter. Analytical expressions for the valley shifts and the transversal and longitudinal effective mass modifications induced by uniaxial [110] stress are obtained and analyzed. The low-field mobility enhancement in the direction of tensile [110] stress in {001} SOI FETs with arbitrary small body thickness is due to a modification of the conductivity mass and is shown to be partly hampered by an increase in nonparabolicity at high stress value.
Keywords :
conduction bands; elemental semiconductors; field effect transistors; k.p calculations; silicon; silicon-on-insulator; stress effects; SOI FET; Si; conduction band; general stress conditions; longitudinal effective mass modifications; low-field mobility enhancement; nonparabolicity effects; shear strain; silicon; stress-induced band structure modification; tensile stress; transversal effective mass modifications; two-band kldrp theory; uniaxial stress; valley shifts; Brillouin scattering; CMOS process; Capacitive sensors; Conductivity; Effective mass; Electron mobility; FETs; Mass production; Silicon; Tensile stress;
Conference_Titel :
Solid State Device Research Conference, 2007. ESSDERC 2007. 37th European
Conference_Location :
Munich
Print_ISBN :
978-1-4244-1123-8
Electronic_ISBN :
1930-8876
DOI :
10.1109/ESSDERC.2007.4430959