Title :
Calculation of RF-MEMS inductors using partial element equivalent circuits
Author :
Yaojiang, Zhang ; Haibo, Long ; Zhenghe, Feng
Author_Institution :
Dept. of Electron. Eng., Tsinghua Univ., Beijing, China
Abstract :
RF-MEMS inductor is a crucial component in radio-frequency integrated circuits (RFIC). Partial element equivalent circuits (PEEC) method is used to model a spiral inductor as a two-port equivalent lumped circuit. Numerical examples showed that the method is easily implemented and accurate in analysis of both planar and three-dimensional inductors
Keywords :
MMIC; UHF integrated circuits; elemental semiconductors; equivalent circuits; inductors; micromechanical devices; semiconductor device models; silicon; RF-MEMS inductors; Si; partial element equivalent circuits; planar inductors; radio-frequency integrated circuits; spiral inductor; three-dimensional inductors; two-port equivalent lumped circuit; Equivalent circuits; Etching; Inductance; Inductors; Radio frequency; Radiofrequency integrated circuits; Radiofrequency microelectromechanical systems; Silicon; Space technology; Spirals;
Conference_Titel :
Microwave and Millimeter Wave Technology, 2000, 2nd International Conference on. ICMMT 2000
Conference_Location :
Beijing
Print_ISBN :
0-7803-5743-4
DOI :
10.1109/ICMMT.2000.895703
