Title :
High-field conduction and breakdown strength in poly-p-xylylene thin film
Author :
Mori, Tatuo ; Takai, Yoshiaki ; Mizutani, Teruyoshi ; Ieda, Masayuki
Author_Institution :
Nagoya University
Keywords :
Breakdown voltage; Dielectric losses; Dielectric thin films; Electric breakdown; Ionization; Plasma measurements; Plasma temperature; Polymer films; Temperature dependence; Transistors;
Conference_Titel :
Electrical Insulating Materials, 1988. Proceedings of the Twenty-First Symposium on
Print_ISBN :
4-88686-041-9
DOI :
10.1109/ISEIM.1988.763481
