DocumentCode
2785367
Title
High-Throughput Fabrication of Nanoelectrodes on Polymer using Nanoinjection and Trench-Filling Techniques
Author
Rust, Michael J. ; Do, Jaephil ; Lee, Se Hwain ; Ahn, Choing H.
Author_Institution
Center for BioMEMS and Nanobiosystems, Department of Electrical & Computer Engineering and Computer Science, University of Cincinnati, Cincinnati, OH 45221, USA, rustmj@ececs.uc.edu
Volume
2
fYear
2006
fDate
17-20 June 2006
Firstpage
573
Lastpage
575
Abstract
In this paper, high throughput fabrication of nanoelectrodes on polymer using nanoinjection and trench-filling techniques is developed and results are presented. The new fabrication method for producing nanoelectrodes on polymer substrates is characterized with scanning electron microscopy, surface profilometry, and atomic force microscopy. This method may be applied to mass-production of low-cost polymer biochips containing ultra-sensitive nanoelectrodes for biosensors in point-of-care medicine.
Keywords
injection molding; nanoelectrodes; nanofabrication; Atomic force microscopy; Biosensors; Delay; Electrodes; Fabrication; Lab-on-a-chip; Molecular biophysics; Nanoscale devices; Nickel; Polymers; injection molding; nanoelectrodes; nanofabrication;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN
1-4244-0077-5
Type
conf
DOI
10.1109/NANO.2006.247717
Filename
1717167
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