Title :
Desorption of moisture from stainless steel tubes and ceramic filters in high purity gas distribution systems
Author :
Haider, A. ; Shadman, F.
Author_Institution :
Arizona Univ., Tucson, AZ, USA
Abstract :
The mechanism of moisture desorption from both stainless steel and ceramic surfaces is studied. A unique experimental setup was designed and utilized to determine desorption under gas flow conditions by monitoring the moisture concentration at the system outlet. A simple analytical technique that was used to analyze the desorption data so acquired, in an effort to normalize the results and thus make them system independent, is presented. Desorption rate constants for stainless steel and ceramic (85% alumina) surfaces are calculated using this model at a constant temperature
Keywords :
desorption; integrated circuit manufacture; moisture measurement; semiconductor technology; ceramic filters; desorption data; gas distribution systems; model; moisture concentration; moisture desorption; stainless steel tubes; system outlet; Ceramics; Filters; Fluid flow; Gases; Kinetic theory; Moisture; Steel; Surface contamination; Testing; Valves;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1990 Proceedings, Competitive Manufacturing for the Next Decade. IEMT Symposium, Ninth IEEE/CHMT International
Conference_Location :
Washington, DC
DOI :
10.1109/IEMT9.1990.115000
