Title :
Low-voltage elctrostatic actuation of droplet on thin superhydrophobic nanoturf
Author :
Yun, Kwang-Seok ; Kim, Chang-Jin CJ
Author_Institution :
Univ. of California, Los Angeles
Abstract :
This paper reports an electrostatic actuation of droplets on a NanoTurf surface. By employing the nanostructured layer instead of a flat and smooth dielectric, both a large driving force and low friction are achieved, presenting a droplet operation at a lower driving voltage compared with general electrowetting-on-dielectric (EWOD) configurations. The dielectric NanoTurf layer is formed on electrodes by using laser interference lithography. With a contact angle of ~170deg and its hysteresis of ~5deg on syperhydrophobic NanoTurf, water droplets are actuated at ~24 V, much lower than general EWOD.
Keywords :
electrostatic actuators; laser beam machining; low-power electronics; microactuators; microfluidics; photolithography; dielectric NanoTurf layer; droplet operation; laser interference lithography; low-voltage electrostatic actuation; nanostructured layer; thin superhydrophobic NanoTurf; water droplets; Dielectrics; Electrodes; Electrostatic actuators; Friction; Hysteresis; Permittivity; Surface resistance; Surface structures; Surface tension; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433035