2798953

Full wafer processing and testing the future of large scale laser fabrication

Vettiger, P. ; Benedict, M.E. ; Bona, G.L. ; Buchmann, P. ; Cahoon, N. ; Daetwyler, K. ; Dietrich, H.P. ; Moser, A. ; Seitz, H.K. ; Voegeli, O. ; Webb, D.J. ; Wolf, P.

IBM Research Laboratory Zurich

1990

9-14 Sept. 1990

144

145

Chemical lasers; Etching; Large-scale systems; Laser feedback; Laser modes; Mirrors; Optical device fabrication; Semiconductor device testing; Semiconductor diodes; Semiconductor lasers;

English

ieee

Semiconductor Laser Conference, 1990. Conference Digest. 12th IEEE International

Davos, Switzerland

conf

10.1109/ISLC.1990.764464

764464