Title :
Rhombic-shaped thermal actuator array for evenly-distributed very large displacement
Author :
Yu, A.B. ; Zhang, X.M. ; Cai, H. ; Zhang, Q.X. ; Liu, A.Q.
Author_Institution :
Nanyang Technol. Univ., Singapore
Abstract :
This paper presents a design of thermal actuator array to generate evenly-distributed displacement by cascading an array of rhombic-shaped units. Such design is implemented to a tunable grating to tune the period by 61% and to produce a total displacement of 215 mum. Such design is scalable to the sub-wavelength level, making its very attractive to many tunable nano-photonic devices.
Keywords :
microactuators; rhombic-shaped unit; thermal actuator array; tunable grating; Arm; Electrostatic actuators; Gratings; Laser tuning; Microelectromechanical devices; Micromechanical devices; Thermal engineering; Thermal expansion; Thermal force; Tunable circuits and devices;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433084
