DocumentCode
2804766
Title
TCAD based device architecture exploration towards half-terahertz silicon/germanium heterojunction bipolar technology
Author
Sibaja-Hernandez, Arturo ; You, Shuzhen ; Van Huylenbroeck, Stefaan ; Venegas, Rafael ; Meyer, Kristin De ; Decoutere, Stefaan
Author_Institution
IMEC, Leuven, Belgium
fYear
2010
fDate
14-16 Sept. 2010
Firstpage
246
Lastpage
249
Abstract
A 2D TCAD based device architecture exploration of SiGe:C NPN HBTs is presented. Two novel and one conventional self-aligned architecture are explored by process and device simulation. All these three architectures show their capability of achieving maximum oscillation frequency (fmax) of 500 GHz for scaled layout rules.
Keywords
Ge-Si alloys; electromagnetic oscillations; heterojunction bipolar transistors; technology CAD (electronics); 2D TCAD based device architecture exploration; NPN HBT; SiGe:C; device simulation; frequency 500 GHz; half-terahertz heterojunction bipolar technology; maximum oscillation frequency; process simulation; self-aligned architecture; Capacitance; Heterojunction bipolar transistors; Performance evaluation; Radio frequency; Resistance; Semiconductor process modeling; Sensitivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference (ESSDERC), 2010 Proceedings of the European
Conference_Location
Sevilla
ISSN
1930-8876
Print_ISBN
978-1-4244-6658-0
Type
conf
DOI
10.1109/ESSDERC.2010.5618373
Filename
5618373
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