High-resolution current and temperature mapping of electronic devices using scanning Joule expansion microscopy

Author

Varesi, J. ; Muenster, S. ; Majumdar, A.

Author_Institution

Dept. of Mech. Eng., California Univ., Berkeley, CA, USA

fYear

1998

fDate

March 31 1998-April 2 1998

Firstpage

169

Lastpage

172

Abstract

A new technique called scanning Joule expansion microscopy has been developed to measure the current and temperature distributions of electronic devices and interconnects with 0.01 /spl mu/m spatial resolution and 20 kHz-1 GHz frequency bandwidth. Based on the atomic force microscope, the technique relies on measuring the AC modulated thermal expansion of a sample due to Joule heating.

Keywords

atomic force microscopy; electric current measurement; heating; integrated circuit interconnections; integrated circuit measurement; integrated circuit reliability; temperature distribution; temperature measurement; thermal expansion; 20 kHz to 1 GHz; AC modulated thermal expansion; Joule heating; atomic force microscope; current distribution; current mapping; electronic device interconnects; electronic devices; mapping resolution; scanning Joule expansion microscopy; temperature distribution; temperature mapping; Atomic force microscopy; Atomic measurements; Bandwidth; Current measurement; Force measurement; Frequency measurement; Scanning electron microscopy; Spatial resolution; Temperature distribution; Thermal force;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium Proceedings, 1998. 36th Annual. 1998 IEEE International

Conference_Location

Reno, NV, USA

Print_ISBN

0-7803-4400-6

Type

conf

DOI

10.1109/RELPHY.1998.670507

Filename

670507