Title :
Study of field emission arrays for travelling wave tubes
Author :
Li, Xinghui ; Liao, Fujiang ; Ding, Mingqing ; Bai, Guodoiig ; Zhang, Fuquan ; Feng, Jinjiin
Author_Institution :
Beijing Vacuum Electron. Res. Inst., China
Abstract :
The Spindle type FEAs were fabricated using n-type silicon wafers with different resistivities. The I-V measurements and emission characteristics of FEAs made from high resistivity wafers indicated that the emission performance was greatly improved. The FEAs were coated with a thin layer of nanocrystalline diamond film (NCD) using microwave plasma chemical vapour deposition (MPCVD). Scanning electron microscopy (SEM) observations of FEAs were made before coating NCD and after coating NCD.
Keywords :
CVD coatings; diamond; elemental semiconductors; field emitter arrays; nanostructured materials; scanning electron microscopy; silicon; thin films; travelling wave tubes; I-V measurements; SEM; Si-C; field emission arrays; n-type silicon wafers; nanocrystalline diamond film; scanning electron microscopy; spindle type FEA; travelling wave tubes; Aging; Coatings; Conductivity; Copper; Current density; Electron beams; Electron emission; Field emitter arrays; Pulse amplifiers; Silicon;
Conference_Titel :
Vacuum Electronics, 2003 4th IEEE International Conference on
Print_ISBN :
0-7803-7699-4
DOI :
10.1109/IVEC.2003.1286402
