Title :
Design and simulation of a self-assembled MEMS force sensor for Minimally Invasive Surgery
Author :
Gutiérrez-Cándano, H. ; Camacho-León, S. ; Dieck-Assad, G. ; Martínez-Chapa, S.O.
Author_Institution :
Dept. of Electr. & Comput. Eng., Tecnol. de Monterrey (ITESM), Monterrey, Mexico
Abstract :
This work describes the design and Finite Element Method (FEM) simulation of an integrated force microsensor which introduces a self-assembled tactile structure with potential application to Minimally Invasive Surgery (MIS). The sensor is designed to be compatible with Complementary Metal-Oxide-Semiconductor-Micro-Electro-Mechanical Systems (CMOS-MEMS) technology under monolithic microfabrication processes, and allows force measurements up to the micronewton scale.
Keywords :
CMOS integrated circuits; bioMEMS; biomedical equipment; finite element analysis; force sensors; microsensors; self-assembly; surgery; CMOS-MEMS technology; complementary metal-oxide-semiconductor-micro-electro-mechanical systems; finite element method simulation; integrated force microsensor; minimally invasive surgery; monolithic microfabrication processes; self-assembled MEMS force sensor; self-assembled tactile structure; Etching; Metals; Micromechanical devices; Resists; Sensors; Substrates; Surgery; Micro-Electro-Mechanical Systems (MEMS); Minimally Invasive Surgery (MIS); force sensing; self-assembling microstructures;
Conference_Titel :
Sensors Applications Symposium (SAS), 2011 IEEE
Conference_Location :
San Antonio, TX
Print_ISBN :
978-1-4244-8063-0
DOI :
10.1109/SAS.2011.5739819
