3D silicon turning micromirror

The concept of designing a 3D silicon turning mirror is combine the two of 2D comb drivers. The turning mirror is driven by electrostatic force with vertical comb fingers. The upper comb driver is composed of a turning mirror plate, two pairs of torsion beams, a supporting frame and vertical comb fingers. The lower comb driver is composed of vertical comb fingers, and a supporting frame, signal lines and pads is based on the Pyrex glass substrate. The both comb drivers could be assembled by flip chip bonding. This turning mirror can be used for laser display, scanner, barcode reader, optical switch etc. The 3D turning micromirror is designed by MEMS Designer. The fabrication processes are mainly composed of comb fabrication and assembling process. The Deep RIE applied to etch the depth of finger layer of comb driver, and MEMS surface micromachine applied to deposit the signal lines and pads on the Pyrex glass substrate. Then, the flip chip bonding technique is applied to bond two comb drivers.