Title :
A rotating micromirror switching element for 1×N optical MEMS switch
Author :
Basha, A. ; Chaudhuri, S. ; Safavi-Naeini, S.
Author_Institution :
Electr. & Comput. Eng., Waterloo Univ., Ont., Canada
Abstract :
A new novel design for a rotating micromirror fabricated by MUMPs process is presented. The micromirror is elevated at 45° from the micromotor´s surface. The electrostatic side drive micromotor is designed to have both stepping and continuous rotation. With rotator diameters of 800μm and 1000μm, a step motion of either 0.75 or 0.5 degree is achieved with total steps of 480 and 720 for full rotation. The rotating micromirror was used to implement a 1×N optical MEMS switch with large number of output fibers.
Keywords :
electrostatic motors; micromirrors; microswitches; optical switches; 1000 micron; 800 micron; MUMP process; continuous rotation; electrostatic side drive micromotor; micromotor surface; optical MEMS switch; output fibers; rotating micromirror switching element; rotator diameter; stepping rotation; Electrostatics; Micromechanical devices; Micromirrors; Micromotors; Microswitches; Optical devices; Optical fiber networks; Optical switches; Rotors; Stators;
Conference_Titel :
Circuits and Systems, 2003 IEEE 46th Midwest Symposium on
Print_ISBN :
0-7803-8294-3
DOI :
10.1109/MWSCAS.2003.1562432
