• DocumentCode
    2840323
  • Title

    UV scanning for SOI defectivity monitoring

  • Author

    Moulin, C. ; Delprat, D. ; Maleville, C. ; McMillan, W. ; Payne, J. ; Bird well, K. ; Brun, R. ; Moirin, R.

  • Author_Institution
    SOITEC SA, Crolles, France
  • fYear
    2005
  • fDate
    3-6 Oct. 2005
  • Firstpage
    146
  • Lastpage
    147
  • Abstract
    This paper shows how a new generation of inspection system enables us to monitor SOI as requested in the ITRS roadmaps; it shows also the large amount of key information we can collect, giving us important feedback on the SOI process.
  • Keywords
    flaw detection; inspection; photodetectors; silicon-on-insulator; surface roughness; ultraviolet detectors; SOI process; UV scanning; defectivity monitoring; inspection system; silicon-on-insulator; Calibration; Inspection; Monitoring; Optical feedback; Optical scattering; Optical sensors; Optical surface waves; Reflectivity; Silicon; Wavelength measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference, 2005. Proceedings. 2005 IEEE International
  • ISSN
    1078-621X
  • Print_ISBN
    0-7803-9212-4
  • Type

    conf

  • DOI
    10.1109/SOI.2005.1563569
  • Filename
    1563569
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2840323