DocumentCode
2849359
Title
MEMS thermal mass flow meter with double-heater structure
Author
Wu, Yuan-Qing ; Yao, Su-Ying
Author_Institution
Sch. of Electron. & Inf. Eng., Tianjin Univ., Tianjin, China
fYear
2011
fDate
17-18 Nov. 2011
Firstpage
1
Lastpage
2
Abstract
With the development of new technology, MEMS thermal flow meter has been rapidly developed. But the existing single-heater models, limit its scope of use, cannot measure high-volume gas flow. In order to change the status, a double-heater structure is presented in this paper, the results of simulation and analysis show that this structure can greatly improve the performance of flow meters.
Keywords
flowmeters; micromechanical devices; MEMS thermal mass flow meter; double heater structure; high volume gas flow; single heater model; Fluid flow measurement; Heating; Micromechanical devices; Temperature measurement; Temperature sensors; MEMS; double-heater structure; flow meter;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Solid-State Circuits (EDSSC), 2011 International Conference of
Conference_Location
Tianjin
ISSN
Pending
Print_ISBN
978-1-4577-1998-1
Electronic_ISBN
Pending
Type
conf
DOI
10.1109/EDSSC.2011.6117606
Filename
6117606
Link To Document