DocumentCode
2853295
Title
Design and materials selection for low power laterally actuating nanoelectromechanical relays
Author
Yoo, Kwang ; Lee, Daewoo ; Tiberio, R. ; Conway, J. ; Wong, H.-S Philip ; Nishi, Yoshio
Author_Institution
Stanford Univ., Stanford, CA, USA
fYear
2012
fDate
1-4 Oct. 2012
Firstpage
1
Lastpage
2
Abstract
This paper reports the design optimization of lateral nanoelectromechanical (NEM) relays for sub 1V actuation by COMSOL simulation with various materials and structures. Measured actuation voltages from fabricated relays showed good matching with simulation.
Keywords
low-power electronics; nanoelectromechanical devices; nanoelectronics; relays; COMSOL simulation; NEM relays; low power laterally actuating nanoelectromechanical relays; material selection; measured actuation voltages; Fabrication; Logic gates; Relays; Semiconductor device modeling; Solids; Structural beams;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference (SOI), 2012 IEEE International
Conference_Location
NAPA, CA
ISSN
1078-621X
Print_ISBN
978-1-4673-2690-2
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2012.6404401
Filename
6404401
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