DocumentCode
285663
Title
A critically-damped integrated capacitive accelerometer using feedback of position and velocity
Author
van Kampen, R.P. ; Wolffenbuttel, R.F.
Author_Institution
Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands
Volume
4
fYear
1992
fDate
3-6 May 1992
Firstpage
2005
Abstract
A novel integrated accelerometer has been designed, in which a special servo technique based on electrostatic feedback has been implemented for linear output. The conventional position feedback with air damping has been extended by electronic means using velocity sensing based on integrated coils. A fabrication sequence is presented, which prevents breakout during manufacturing
Keywords
accelerometers; electrostatic devices; feedback; servomechanisms; critically-damped integrated capacitive accelerometer; electrostatic feedback; fabrication sequence; integrated coils; linear output; position feedback; servo technique; velocity sensing; Acceleration; Accelerometers; Capacitive sensors; Damping; Electrostatics; Fabrication; Force feedback; Output feedback; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 1992. ISCAS '92. Proceedings., 1992 IEEE International Symposium on
Conference_Location
San Diego, CA
Print_ISBN
0-7803-0593-0
Type
conf
DOI
10.1109/ISCAS.1992.230383
Filename
230383
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