Title :
Invited: Modern MOS semiconductor processing methods
Author_Institution :
Mostek Corp., Carrollton, TX, USA
Abstract :
A recently completed 3" MOS-LSI wafer processing facility will be described, including ion implantation, automatic wafer handling, automatic mask allignment and design automation aids. Emphasis will be on techniques useful in LSI design and processing.
Keywords :
Boats; Circuit testing; Costs; Electronic components; Large scale integration; MOSFETs; Manufacturing processes; Marketing and sales; Resists; Silicon;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1974 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1974.1155338
