Title :
CO2 laser wave front and beam metrology using Quadri-Wave Lateral Shearing Interferometry
Author :
Velghe, Sabrina ; Boucher, William ; Brahmi, Djamel ; Wattellier, Benoit
Author_Institution :
Phasics SA, XTEC, Palaiseau, France
Abstract :
This work proposes a method based on quadri-wave lateral shearing interferometry (QWLSI) for CO2 laser measurement. This technique allows complete field analysis of the laser and gives beam parameters such as M2, waist position, beam size, and Strehl ratio or far field analysis. In addition, this study investigates the metrological features of the interferometer and presents further experimental analysis of a CO2 laser.
Keywords :
carbon compounds; gas lasers; laser beams; laser variables measurement; light interferometry; CO2; CO2 laser analysis; CO2 laser measurement; CO2 laser wave front; M2 beam parameter; Strehl ratio; beam metrology; beam size; beam waist position; far field analysis; metrological features; quadriwave lateral shearing interferometry; Diffraction gratings; Interference; Laser beam cutting; Laser beams; Metrology; Optical interferometry; Optimized production technology; Power lasers; Shearing; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-4079-5
Electronic_ISBN :
978-1-4244-4080-1
DOI :
10.1109/CLEOE-EQEC.2009.5196256
