• DocumentCode
    2862896
  • Title

    Analysis of nano-channel array fabricated by multi-step anodic aluminum oxide method

  • Author

    Chen, Chun-Ko ; Chen, Sheng-Hui

  • Author_Institution
    Dept. of Opt. & Photonics, Nat. Central Univ., Chungli, Taiwan
  • fYear
    2011
  • fDate
    21-24 June 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Nano-channel array has been fabricated by anodic aluminum oxide(AAO) method with 100 V, 120 V, and 140 V bias voltages and 1, 5-step AAO process in this study. We discussed the growing mechanism of nano-channels and effect of multi-step in AAO process. At least, the distribution and circularity of nano-channel array under different bias voltage were analyzed.
  • Keywords
    aluminium compounds; nanofabrication; AAO process; bias voltage; multi-step anodic aluminum oxide method; nano-channel array; voltage 100 V; voltage 120 V; voltage 140 V; Aluminum oxide; Arrays; Chemicals; Fabrication; Optical design; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference (INEC), 2011 IEEE 4th International
  • Conference_Location
    Tao-Yuan
  • ISSN
    2159-3523
  • Print_ISBN
    978-1-4577-0379-9
  • Electronic_ISBN
    2159-3523
  • Type

    conf

  • DOI
    10.1109/INEC.2011.5991761
  • Filename
    5991761
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2862896