Title :
Analysis of nano-channel array fabricated by multi-step anodic aluminum oxide method
Author :
Chen, Chun-Ko ; Chen, Sheng-Hui
Author_Institution :
Dept. of Opt. & Photonics, Nat. Central Univ., Chungli, Taiwan
Abstract :
Nano-channel array has been fabricated by anodic aluminum oxide(AAO) method with 100 V, 120 V, and 140 V bias voltages and 1, 5-step AAO process in this study. We discussed the growing mechanism of nano-channels and effect of multi-step in AAO process. At least, the distribution and circularity of nano-channel array under different bias voltage were analyzed.
Keywords :
aluminium compounds; nanofabrication; AAO process; bias voltage; multi-step anodic aluminum oxide method; nano-channel array; voltage 100 V; voltage 120 V; voltage 140 V; Aluminum oxide; Arrays; Chemicals; Fabrication; Optical design; Voltage measurement;
Conference_Titel :
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location :
Tao-Yuan
Print_ISBN :
978-1-4577-0379-9
Electronic_ISBN :
2159-3523
DOI :
10.1109/INEC.2011.5991761
