DocumentCode
2863364
Title
Rigorous mathematical models for the reconstruction of thin films profiles from X-ray intensities
Author
Slavyanov, S. ; Ern, C. ; Dosch, H.
Author_Institution
Dept. of Comput. Phys., St. Petersburg State Univ., Russia
fYear
2000
fDate
2000
Firstpage
161
Lastpage
167
Abstract
We present a novel theoretical approach which allows the analytical reconstruction of profile functions associated with thin films as observed by array diffraction. Our concept is based on the representation of the profile function by appropriate linear differential equations with polynomial coefficients that have straight forward Fourier transforms. Several theoretical examples of practical importance are discussed
Keywords
Fourier transforms; X-ray crystallography; X-ray diffraction; copper alloys; gold alloys; linear differential equations; metallic epitaxial layers; metallic thin films; polynomials; Cu3Au; Fourier transforms; X-ray intensities; array diffraction; linear differential equations; polynomial coefficients; profile functions; reconstruction; thin film profiles; Differential equations; Fourier transforms; Magnetic confinement; Magnetic films; Magnetic materials; Mathematical model; Polymer films; Polynomials; Transistors; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Day on Diffraction Millenniuym Workshop, 2000. International Seminar
Conference_Location
St. Petersburg
Print_ISBN
5-7997-0252-4
Type
conf
DOI
10.1109/DD.2000.902369
Filename
902369
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