Title :
Rigorous mathematical models for the reconstruction of thin films profiles from X-ray intensities
Author :
Slavyanov, S. ; Ern, C. ; Dosch, H.
Author_Institution :
Dept. of Comput. Phys., St. Petersburg State Univ., Russia
Abstract :
We present a novel theoretical approach which allows the analytical reconstruction of profile functions associated with thin films as observed by array diffraction. Our concept is based on the representation of the profile function by appropriate linear differential equations with polynomial coefficients that have straight forward Fourier transforms. Several theoretical examples of practical importance are discussed
Keywords :
Fourier transforms; X-ray crystallography; X-ray diffraction; copper alloys; gold alloys; linear differential equations; metallic epitaxial layers; metallic thin films; polynomials; Cu3Au; Fourier transforms; X-ray intensities; array diffraction; linear differential equations; polynomial coefficients; profile functions; reconstruction; thin film profiles; Differential equations; Fourier transforms; Magnetic confinement; Magnetic films; Magnetic materials; Mathematical model; Polymer films; Polynomials; Transistors; X-ray scattering;
Conference_Titel :
Day on Diffraction Millenniuym Workshop, 2000. International Seminar
Conference_Location :
St. Petersburg
Print_ISBN :
5-7997-0252-4
DOI :
10.1109/DD.2000.902369
