DocumentCode
2863503
Title
Femtosecond laser micromachined multiple-orifice two-dimensional ejector arrays for picoliter droplet ejection
Author
Demirci, Utkan ; Ozcan, Aydogan
Author_Institution
Bio-MEMS Resource Center, Shriners Burns Inst., Boston, MA
fYear
2006
fDate
21-26 May 2006
Firstpage
1
Lastpage
2
Abstract
A femtosecond laser micromachined multi-orifice two-dimensional silicon-nitride membrane array is reported to generate picoliter droplets. This device uses a higher-order resonance ejection mechanism, increases the flow rate per membrane and can eject from various locations on a membrane.
Keywords
laser beam machining; micromachining; femtosecond laser; micromachined; multiple orifice 2D ejector arrays; picoliter droplet ejection; Biomembranes; Hospitals; Micromachining; Optical arrays; Optical device fabrication; Orifices; Reservoirs; Resonance; Semiconductor laser arrays; Ultrafast optics; 230.4000 Microstructure fabrication; 350.3390 Laser materials processing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location
Long Beach, CA
Print_ISBN
978-1-55752-813-1
Electronic_ISBN
978-1-55752-813-1
Type
conf
DOI
10.1109/CLEO.2006.4627757
Filename
4627757
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