Title :
Characterization of nanoscale structures observed in femtosecond laser micromachining
Author :
Bricchi, Erica ; Yang, Weijia ; Horak, Peter ; Corbari, Costantino ; Kazansky, Peter G.
Author_Institution :
Optoelectron. Res. Centre, Univ. of Southampton, Southampton
Abstract :
We present a quantitative analysis of self-arranged sub-wavelength structures created by femtosecond laser micromachining in silica. From the spatial correlation we calculate the periods of the structures versus laser energy and wavelength, and translation speed.
Keywords :
high-speed optical techniques; laser beam machining; micromachining; nanofabrication; nanophotonics; nanostructured materials; optical fabrication; silicon compounds; SiO2; femtosecond laser micromachining; nanoscale structure characterization; quantitative analysis; self-arranged sub-wavelength structures; silica; spatial correlation; Geometrical optics; Micromachining; Nanostructures; Optical materials; Optical pulses; Optical waveguides; Periodic structures; Scanning electron microscopy; Silicon compounds; Ultrafast optics; (140.3390) Laser materials processing; (320.7120) Ultrafast phenomena;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4627761
