DocumentCode
2865673
Title
A miniature integrated circuit accelerometer
Author
Roylance, L. ; Angell, J.
Author_Institution
Hewlett-Packard Laboratories, Palo Alto, CA, USA
Volume
XXI
fYear
1978
fDate
15-17 Feb. 1978
Firstpage
220
Lastpage
221
Abstract
Batch fabrication of an extremely small accelerometer, 3mm long and weighing 0.02gm, has been achieved using silicon IC technology. Accelerations from 0.001g to 50g can be measured over a 100Hz bandwidth.
Keywords
Acceleration; Accelerometers; Bandwidth; Etching; Fabrication; Glass; Particle beams; Resistors; Silicon; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1978 IEEE International
Conference_Location
San Francisco, CA, USA
Type
conf
DOI
10.1109/ISSCC.1978.1155836
Filename
1155836
Link To Document