DocumentCode
2869958
Title
A stacked high capacitor RAM
Author
Ohta, K. ; Yamada, K. ; Saitoh, M. ; Shiraki, H. ; Nakamura, A. ; Shimizu, K. ; Tarui, Y.
Author_Institution
VLSI Tech. Res. Association Cooperative Labs., Kawasaki, Japan
Volume
XXIII
fYear
1980
fDate
13-15 Feb. 1980
Firstpage
66
Lastpage
67
Keywords
Capacitance; Capacitors; Electrons; Laboratories; Lithography; MOSFET circuits; Random access memory; Read-write memory; Supercapacitors; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1980 IEEE International
Conference_Location
San Francisco, CA, USA
Type
conf
DOI
10.1109/ISSCC.1980.1156087
Filename
1156087
Link To Document