• DocumentCode
    2869958
  • Title

    A stacked high capacitor RAM

  • Author

    Ohta, K. ; Yamada, K. ; Saitoh, M. ; Shiraki, H. ; Nakamura, A. ; Shimizu, K. ; Tarui, Y.

  • Author_Institution
    VLSI Tech. Res. Association Cooperative Labs., Kawasaki, Japan
  • Volume
    XXIII
  • fYear
    1980
  • fDate
    13-15 Feb. 1980
  • Firstpage
    66
  • Lastpage
    67
  • Keywords
    Capacitance; Capacitors; Electrons; Laboratories; Lithography; MOSFET circuits; Random access memory; Read-write memory; Supercapacitors; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference. Digest of Technical Papers. 1980 IEEE International
  • Conference_Location
    San Francisco, CA, USA
  • Type

    conf

  • DOI
    10.1109/ISSCC.1980.1156087
  • Filename
    1156087