DocumentCode
2873669
Title
An elastomeric tactile sensor employing dielectric constant variation and applicable to orthodontia
Author
Tseng, Fan-Gang ; Yang, Chih-Sheng ; Pan, Li-Chern
Author_Institution
EES Dept., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear
2004
fDate
2004
Firstpage
564
Lastpage
567
Abstract
This paper introduces a capacitive-type elastomeric tactile sensor for the application of orthodontia. Different from many capacitive-type tactile sensors employing gap-distance or electrode-overlap changing for pressure or shear signal measurement, this sensor applies electrostriction effect (dielectric constant change due to dielectric particles distance variation) for signal detection, thus allows electrodes placed on the same plane for orthodontia application. Biocompatible silicon rubber is used as the buffer layer to sustain large force. By particle distance variation increasing the equivalent particle concentration, this sensor can reach a sensitivity of 0.269 nF/Mpa with a free load capacitance of 18 pF, comparable to those from other type capacitive tactile sensors. Fabrication and simulation has been successfully carried out for comparison.
Keywords
biosensors; capacitive sensors; dentistry; electrostriction; force measurement; orthotics; permittivity; rubber; silicon; tactile sensors; 18 PF; biocompatible silicon rubber; capacitive sensor; dielectric constant; dielectric particles; elastomeric tactile sensor; electrode overlap; electrostriction effect; orthodontia; particle concentration; sensitivity; shear signal measurement; signal detection; Biosensors; Capacitive sensors; Dielectric constant; Dielectric measurements; Electrodes; Electrostriction; Particle measurements; Pressure measurement; Signal detection; Tactile sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN
0-7803-8265-X
Type
conf
DOI
10.1109/MEMS.2004.1290647
Filename
1290647
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