• DocumentCode
    2874819
  • Title

    A Novel MEMS Based Infrared Biosensor for Ultra-Sensitive Detection of Waterborne Pathogens

  • Author

    Zhang, Lei ; Dong, Tao ; Yang, Zhaochu ; Zhao, Xinyan ; Høivik, Nils ; Yamamoto, Y. ; Wenger, Ch. ; Tillack, B.

  • fYear
    2012
  • fDate
    1-3 June 2012
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In this paper, a new concept of MEMS based biosensor is presented as a promising solution for the ultra- low level and real time detection of waterborne pathogens. This novel infrared biosensor employs the SiGe/Si quantum well thermistor with a high TCR and low 1/f noise to achieve a high sensitive detection through its resistance change with the absorption of infrared radiation from the dark quencher. Meanwhile, a manufacturing process applying the adhesive wafer bonding is proposed.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Remote Sensing, Environment and Transportation Engineering (RSETE), 2012 2nd International Conference on
  • Conference_Location
    Nanjing, Jiangsu, China
  • Print_ISBN
    978-1-4673-0872-4
  • Type

    conf

  • DOI
    10.1109/RSETE.2012.6260364
  • Filename
    6260364
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2874819