DocumentCode :
2875291
Title :
Proximity X-Ray Lithography Using a Droplet-Target Laser-Plasma Source
Author :
Malmqvist, L. ; Rymell, L. ; Hertz, H.M.
fYear :
1996
fDate :
8-13 Sept. 1996
Firstpage :
201
Lastpage :
201
Keywords :
Costs; Laser theory; Optimized production technology; Plasma applications; Plasma chemistry; Plasma waves; Plasma x-ray sources; Power lasers; X-ray lasers; X-ray lithography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3169-9
Type :
conf
DOI :
10.1109/CLEOE.1996.562331
Filename :
562331
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2875291
بازگشت