• DocumentCode
    2875411
  • Title

    High quality thin oxide films formed by using ultra low temperature liquid phase deposition

  • Author

    Yeh, Ching-Fa ; Lin, Shyue-Shyh ; Hong, Tzy-Yan

  • Author_Institution
    National Chiao-Tung University
  • fYear
    1994
  • fDate
    1994
  • Firstpage
    28815
  • Lastpage
    29911
  • Keywords
    Dielectric liquids; Dielectric thin films; Electric breakdown; Etching; Leakage current; Optical films; Silicon compounds; Substrates; Surface topography; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
  • Type

    conf

  • DOI
    10.1109/EDMS.1994.771352
  • Filename
    771352
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2875411