DocumentCode
2877997
Title
Comparison of classical and two-photon photoelectric laser stimulation capabilities for failure analysis
Author
Shao, K. ; Pouget, V. ; Faraud, E. ; Larue, C. ; Lewis, D.
Author_Institution
IMS, Univ. of Bordeaux, Talence, France
fYear
2011
fDate
4-7 July 2011
Firstpage
1
Lastpage
4
Abstract
This paper reviews important parameters for the two-photon absorption (TPA) laser stimulation technique and presents results concerning the characterization of the TPA effective spot size along lateral and axial directions. TPA scans are compared with classical photoelectric stimulation images to investigate TPA capabilities for failure analysis and design debug.
Keywords
OBIC; failure analysis; photoelectricity; two-photon processes; design debug; failure analysis; photoelectric laser stimulation capabilities; two-photon absorption laser stimulation technique; Absorption; Laser beams; Measurement by laser beam; Optical imaging; Semiconductor lasers; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
Conference_Location
Incheon
ISSN
1946-1542
Print_ISBN
978-1-4577-0159-7
Electronic_ISBN
1946-1542
Type
conf
DOI
10.1109/IPFA.2011.5992781
Filename
5992781
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