• DocumentCode
    2879746
  • Title

    Integrated 84ps ECL with I2L

  • Author

    Nakamura, T. ; Nakazato, Kazuo ; Miyazaki, Toshimasa ; Okabe, Toshiya ; Naga, M.

  • Author_Institution
    Hitachi Central Research Laboratory, Tokyo, Japan
  • Volume
    XXVII
  • fYear
    1984
  • fDate
    22-24 Feb. 1984
  • Firstpage
    152
  • Lastpage
    153
  • Abstract
    A side wall base contact structure used to fabricate 84ps ECL and 320ps I2L circuits with gate areas of 3500μm2and 112μm2will be covered.
  • Keywords
    Circuit testing; Coupling circuits; Delay; Doping; Electron devices; Etching; Iron; Semiconductor device measurement; Switching circuits; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference. Digest of Technical Papers. 1984 IEEE International
  • Conference_Location
    San Francisco, CA, USA
  • Type

    conf

  • DOI
    10.1109/ISSCC.1984.1156658
  • Filename
    1156658
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2879746