Independently controlled rf micro-dielectric barrier discharge arrays

Summary form only given. Arrays of micro dielectric barrier discharges (mDBD´s) excited by radio-frequency (rf) wave forms are attractive as planar sources of radicals and charged species. The devices of interest have apertures tens of microns in diameter with spacing of tens to hundreds of microns. Independently controlled rf mDBDs can be optimized for producing UV photons and for isolation between discharges. When using the mDBDs to produce plumes of excited states and charged species, there are potential interactions between the mDBD devices. This is particularly the case when auxiliary electrodes are used to extract the charged species.