Title :
Effects of wire thickness, neutral pressure and gas composition on the inflection point technique
Author :
Yip, Chi-Shung ; Hershkowitz, Noab
Author_Institution :
Univ. of Wisconsin - Madison, Madison, WI, USA
Abstract :
Summary form only given. The inflection point technique in the limit of zero emission determines the plasma potential by fitting a straight line to the graph of the emission current versus the inflection point of the emissive probe I-V traces. The plasma potential is determined by extrapolating the line to the limit of zero emission. The effects of wire thickness, gas composition, neutral pressure and position on the technique were investigated. Experiments were performed in a multi-dipole filament discharge. Wire thicknesses of 0.013, 0.025, 0.05 and 0.1mm were studied. Experiments were done in Argon, Xenon and Helium plasmas with neutral pressures ranging from 0.5mTorr to 3mTorr. Measurements were performed from the bulk of the plasma to its sheath edge near a 10cm diameter negatively biased plate.
Keywords :
argon; discharges (electric); extrapolation; helium; plasma pressure; plasma sheaths; plasma transport processes; xenon; Ar; He; Xe; emission current; extrapolation; gas composition; inflection point technique; multidipole filament discharge; neutral pressure; plasma potential; pressure 0.5 mtorr to 3 mtorr; sheath edge; size 0.013 mm to 10 cm; wire thickness; zero emission; Wires;
Conference_Titel :
Plasma Science (ICOPS), 2011 Abstracts IEEE International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-61284-330-8
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2011.5992975