DocumentCode
2882033
Title
W-band on wafer measurement of active and passive devices
Author
Edgar, D.L. ; Elgaid, K. ; Williamson, F. ; Ross, A. ; McLelland, H. ; Ferguson, Stacey ; Doherty, F. ; Thayne, I.G. ; Taylor, M.R.S. ; Beaumont, S.P.
Author_Institution
Dept. of Electron. & Electr. Eng., Glasgow Univ., UK
fYear
1999
fDate
1999
Firstpage
42401
Lastpage
42406
Abstract
In this paper we have presented a study of the effect of back-thinning standard CPW wafers and the influence on measured W-band performance. Improvements in measured insertion loss and substrate cross-talk have been observed, and a study of the effect of a quartz spacer layer has been made. Additionally, the improvement in measured performance of active devices after wafer thinning has also been shown, and further progress is expected in this area
Keywords
millimetre wave measurement; CPW wafer thinning; W-band on-wafer measurement; active device; insertion loss; passive device; quartz spacer layer; substrate crosstalk;
fLanguage
English
Publisher
iet
Conference_Titel
Microwave Measurements: Current Techniques and Trends (Ref. No. 1999/008), IEE Colloquium on
Conference_Location
London
Type
conf
DOI
10.1049/ic:19990025
Filename
771828
Link To Document